[PS-8-12] Sputtered Pb(Zr,Ti)O3 piezoelectric films for MEMS application

H. Kobayashi¹、M. Hirose¹、I. Kimura¹、K. Suu¹ (1.ULVAC Inc. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-8-12