[PS-8-12] Sputtered Pb(Zr,Ti)O3 piezoelectric films for MEMS application

H. Kobayashi¹, M. Hirose¹, I. Kimura¹, K. Suu¹ (1.ULVAC Inc. , Japan)

https://doi.org/10.7567/SSDM.2012.PS-8-12