The Japan Society of Applied Physics

[PS-8-13] High-performance high-k SmTiO3 gate dielectrics for amorphous InGaZnO thin-film transistor applications

F. H. Chen1, M. N. Hung1, H. Y. Chen1, J. H. Liu1, J. L. Her1, Y. H. Matsuda2, T. M. Pan1 (1.Chang Gung Univ. , Taiwan, 2.Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.PS-8-13