[PS-8-13] High-performance high-k SmTiO3 gate dielectrics for amorphous InGaZnO thin-film transistor applications

F. H. Chen¹、M. N. Hung¹、H. Y. Chen¹、J. H. Liu¹、J. L. Her¹、Y. H. Matsuda²、T. M. Pan¹ (1.Chang Gung Univ. , Taiwan、2.Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.PS-8-13