[PS-8-13] High-performance high-k SmTiO3 gate dielectrics for amorphous InGaZnO thin-film transistor applications

F. H. Chen¹, M. N. Hung¹, H. Y. Chen¹, J. H. Liu¹, J. L. Her¹, Y. H. Matsuda², T. M. Pan¹ (1.Chang Gung Univ. , Taiwan, 2.Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2012.PS-8-13