The Japan Society of Applied Physics

[A-4-1] A Novel High-Density Embedded AND-type Spilt Gate Flash Memory

W.C. Shen1、H.W. Pan1、Z.S. Yang1、Y.D. Chih2、T.L. Lee1、C.W. Lien1、Y.C. King1、C.J. Lin1 (1.National Tsing Hua Univ.、2.Taiwan Semiconductor Manufacturing Company (Taiwan))

https://doi.org/10.7567/SSDM.2013.A-4-1