The Japan Society of Applied Physics

[A-4-1] A Novel High-Density Embedded AND-type Spilt Gate Flash Memory

W.C. Shen1, H.W. Pan1, Z.S. Yang1, Y.D. Chih2, T.L. Lee1, C.W. Lien1, Y.C. King1, C.J. Lin1 (1.National Tsing Hua Univ., 2.Taiwan Semiconductor Manufacturing Company (Taiwan))

https://doi.org/10.7567/SSDM.2013.A-4-1