[A-5-1] Optimum Crystal Orientation in Rhombohedral PZT Films for FeRAM Application

H. Funakubo¹、Y. Ehara¹、T. Oikawa¹、T. Yamada^2,3、S. Utsugi¹ (1.Tokyo Inst. Tech.、2.Nagoya Univ.、3.JST (Japan))

https://doi.org/10.7567/SSDM.2013.A-5-1