[B-3-1] 3D dopant analysis in nano scale devices (FinFETs) by Atom Probe Tomography

A.K. Kambham^1,2, A. Kumar^1,2, W. Vandervorst^1,2 (1.Katholieke Univ. Leuven, 2.IMEC (Belgium))

https://doi.org/10.7567/SSDM.2013.B-3-1