The Japan Society of Applied Physics

[B-3-3] Size and Stress Effects in Ultraviolet Raman Spectra of Few-Nanometer-Thick SOI Nanofilms and Single Nanowires for Future CMOS Devices

V.D. Poborchii1、T. Tada1、Y. Morita1、S. Migita1、T. Kanayama1、P. Geshev2 (1.National Institute of Advanced Industrial Science and Tech.、2.Inst. of Thermophysics of the Russian Academy of Sciences (Japan))

https://doi.org/10.7567/SSDM.2013.B-3-3