[C-5-3] Width Dependent Transport in Multilayer Graphene Interconnects: Exploring Ways to Reduce Resistance

H. Miyazaki¹, M. Katagiri¹, Y. Yamazaki¹, M. Suzuki¹, N. Sakuma¹, R. Kosugi², K. Imazeki², K. Ueno², A. Kajita¹, T. Sakai¹ (1.Low-power Electronics Association and Project, 2.Shibaura Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2013.C-5-3