[C-5-3] Width Dependent Transport in Multilayer Graphene Interconnects: Exploring Ways to Reduce Resistance

H. Miyazaki¹、M. Katagiri¹、Y. Yamazaki¹、M. Suzuki¹、N. Sakuma¹、R. Kosugi²、K. Imazeki²、K. Ueno²、A. Kajita¹、T. Sakai¹ (1.Low-power Electronics Association and Project、2.Shibaura Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2013.C-5-3