[C-5-4] Multi-layer graphene interconnects grown by CVD for future LSI

D. Kondo¹、H. Nakano¹、B. Zhou¹、I. Kubota¹、K. Hayashi¹、J. Yamaguchi¹、T. Ohkochi²、M. Kotsugi²、S. Sato¹、N. Yokoyama¹ (1.AIST、2.SPring-8 (Japan))

https://doi.org/10.7567/SSDM.2013.C-5-4