Multi-layer graphene interconnects grown by CVD for future LSI

D. Kondo; H. Nakano; B. Zhou; I. Kubota; K. Hayashi; J. Yamaguchi; T. Ohkochi; M. Kotsugi; S. Sato; N. Yokoyama

doi:https://doi.org/10.7567/SSDM.2013.C-5-4

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[C-5-4] Multi-layer graphene interconnects grown by CVD for future LSI

D. Kondo¹, H. Nakano¹, B. Zhou¹, I. Kubota¹, K. Hayashi¹, J. Yamaguchi¹, T. Ohkochi², M. Kotsugi², S. Sato¹, N. Yokoyama¹ (1.AIST, 2.SPring-8 (Japan))

https://doi.org/10.7567/SSDM.2013.C-5-4

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