[E-2-3] Size Dependence of Electrostatic Lens Effect in Vertical Pillar Type MOSFET

M. Muraguchi^1,2、T. Endoh^1,2 (1.Tohoku Univ.、2.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.E-2-3