[E-5-4] Dopant-Atom-based SOI-Transistors by Selective Nanoscale Doping

A. Samanta¹、D. Moraru¹、Y. Kuzuya¹、K. Tyszka^1,2、L.T. Anh³、T. Mizuno¹、R. Jablonski²、H. Mizuta^3,4、M. Tabe¹ (1.Shizuoka Univ.、2.Warsaw Univ. of Tech.、3.Japan Advanced Inst. of Sci. and Tech.、4.Univ. of Southampton (Japan))

https://doi.org/10.7567/SSDM.2013.E-5-4