[E-5-4] Dopant-Atom-based SOI-Transistors by Selective Nanoscale Doping

A. Samanta¹, D. Moraru¹, Y. Kuzuya¹, K. Tyszka^1,2, L.T. Anh³, T. Mizuno¹, R. Jablonski², H. Mizuta^3,4, M. Tabe¹ (1.Shizuoka Univ., 2.Warsaw Univ. of Tech., 3.Japan Advanced Inst. of Sci. and Tech., 4.Univ. of Southampton (Japan))

https://doi.org/10.7567/SSDM.2013.E-5-4