[G-1-6] Light-Addressable Potentiometric Sensor Treated by Nitrogen Plasma Immersion Ion Implantation for Chloride Ions Detection

Y.R. Ye¹, Y.H. Lin¹, Y.H. Chiang¹, J.C. Wang¹, C.S. Lai¹, C.F. Ai², W.F. Tsai², C. Chang³, A.T. Cho³, J.J. Chang³, M.F. Chiang³ (1.Department of Electronic Engineering, Chang Gung Univ., 2.Institute of Nuclear Energy Research, Atomic Energy Council, 3.Advanced Device Application Department, AU Optronics Corporation (Taiwan))

https://doi.org/10.7567/SSDM.2013.G-1-6