[G-1-6] Light-Addressable Potentiometric Sensor Treated by Nitrogen Plasma Immersion Ion Implantation for Chloride Ions Detection

Y.R. Ye¹、Y.H. Lin¹、Y.H. Chiang¹、J.C. Wang¹、C.S. Lai¹、C.F. Ai²、W.F. Tsai²、C. Chang³、A.T. Cho³、J.J. Chang³、M.F. Chiang³ (1.Department of Electronic Engineering, Chang Gung Univ.、2.Institute of Nuclear Energy Research, Atomic Energy Council、3.Advanced Device Application Department, AU Optronics Corporation (Taiwan))

https://doi.org/10.7567/SSDM.2013.G-1-6