[G-2-3] Fabrication and Evaluation of Differential Si Ring Optical Resonator for Biosensors

T. Taniguchi¹, Y. Amemiya¹, T. Ikeda¹, A. Kuroda¹, S. Yokoyama¹ (1.Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.G-2-3