[G-2-3] Fabrication and Evaluation of Differential Si Ring Optical Resonator for Biosensors

T. Taniguchi¹、Y. Amemiya¹、T. Ikeda¹、A. Kuroda¹、S. Yokoyama¹ (1.Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.G-2-3