[G-3-4] Light source modulated and oxygen annealing NbOx/Si-LAPS for hydrogen ion image sensor

Y.T. Yeh¹、T.W. Chiang¹、A. Das¹、Y.H. Liao²、X.Z. Zhuang¹、C.M. Yang²、C.S. Lai¹ (1.Univ. of Chang Gung、2.Univ. of Chang Gung (Taiwan))

https://doi.org/10.7567/SSDM.2013.G-3-4