[G-3-4] Light source modulated and oxygen annealing NbOx/Si-LAPS for hydrogen ion image sensor

Y.T. Yeh¹, T.W. Chiang¹, A. Das¹, Y.H. Liao², X.Z. Zhuang¹, C.M. Yang², C.S. Lai¹ (1.Univ. of Chang Gung, 2.Univ. of Chang Gung (Taiwan))

https://doi.org/10.7567/SSDM.2013.G-3-4