[G-4-2] Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology

T. Konishi¹, D. Yamane², T. Matsushima¹, S. Maruyama³, K. Kagaya², H. Ito², N. Ishihara², H. Toshiyoshi³, K. Machida^1,2, K. Masu² (1.NTT Advanced Tech. Corp., 2.Tokyo Tech., 3.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2013.G-4-2