[G-4-2] Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology

T. Konishi¹、D. Yamane²、T. Matsushima¹、S. Maruyama³、K. Kagaya²、H. Ito²、N. Ishihara²、H. Toshiyoshi³、K. Machida^1,2、K. Masu² (1.NTT Advanced Tech. Corp.、2.Tokyo Tech.、3.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2013.G-4-2