[G-6-2] Impact of Plasma Nitridation on Reliability Performance of MIM Capacitors Based on ZrLaO_x/ZrTiO_x/ZrLaO_x Laminate Insulator

C.C. Lin¹、R.S. Jiang¹、Y.B. Lin¹、M.T. Yu¹、C.E. Sun¹、Y.H. Wu¹ (1.National Tsing Hua Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2013.G-6-2