[G-7-1] 3D Heterogeneous Integration for Nanosensor Systems – the EU-Project e-BRAINS

M. Fernández–Bolaños¹, P. Ramm², R. Pufall³, E. Buitrago¹, C. Zilch⁴, H. Guerin¹, H. Le Poche⁵, R. Pohle⁶, A. Popescu⁶, A.M. Ionescu¹ (1.École Polytechnique Fédérale de Lausanne (EPFL), 2.Fraunhofer Research Institution for Modular Solid State Technologies EMFT, 3.Infineon Technologies AG, 4.Magna Diagnostics GmbH, 5.LITEN⁄DTNM⁄LCH, Commissariat à l'énergie atomique et aux énergies alternatives, 6.SIEMENS AG Corporate Research Munich (Switzerland))

https://doi.org/10.7567/SSDM.2013.G-7-1