[J-2-2] Application of AlTiO thin films to AlTiO/AlGaN/GaN metal-insulator-semiconductor heterojunction field-effect transistors T.Q. Nguyen1、T. Ui1、M. Kudo1、H.A. Shih1、T. Suzuki1 (1.JAIST (Japan)) https://doi.org/10.7567/SSDM.2013.J-2-2