[J-5-2] Electrical Characteristics of 21-kV SiC BJTs with Space-Modulated Junction Termination Extension

T. Okuda¹, H. Miyake¹, T. Kimoto¹, J. Suda¹ (1.Kyoto Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.J-5-2