[J-8-4] Fabrication and Characterization of Micromachined Cantilever Loaded with a Resonant Tunneling Diode for Delta-Sigma Type Strain Sensor Applications

Y. Kakutani¹, D. Wu¹, J. Pan¹, J. Nakano¹, M. Mori¹, K. Maezawa¹ (1.Univ. Toyama (Japan))

https://doi.org/10.7567/SSDM.2013.J-8-4