[J-8-4] Fabrication and Characterization of Micromachined Cantilever Loaded with a Resonant Tunneling Diode for Delta-Sigma Type Strain Sensor Applications

Y. Kakutani¹、D. Wu¹、J. Pan¹、J. Nakano¹、M. Mori¹、K. Maezawa¹ (1.Univ. Toyama (Japan))

https://doi.org/10.7567/SSDM.2013.J-8-4