[K-1-3] High Speed Waveguide Integrated Lateral P-I-N Ge on Si Photodiode with very Low Dark Current

L. Virot^1,2,3, L. Vivien¹, J.M. Hartmann², Y. Bogumilowicz², J.M. Fedeli², D. Marris Morini¹, E. Cassan¹, C. Baudot³, F. Boeuf³ (1.Institut d'Electronique Fondamentale, 2.CEA-Leti, 3.STMicroelectronics (France))

https://doi.org/10.7567/SSDM.2013.K-1-3