[K-2-5] High Density and High Aspect Ratio GaAs/AlGaAs Nanopillar array Fabricated by Fusion of Bio-Template and Neutral Beam Etching

Y. Tamura^1,6、A. Higo²、T. KIba^3,6、W. Yunpeng⁴、C. Thomas^1,6、T. Okada¹、W. Hu^1,6、A. Murayama^3,6、M. Sugiyama⁵、Y. Nakano⁴、S. Samukawa^1,2,6 (1.Tohoku Univ.、2.WPI-AIMR, Tohoku Univ.、3.Hokkaido Univ.、4.RCAST, Univ. of Tokyo、5.Univ. of Tokyo、6.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.K-2-5