[K-2-5] High Density and High Aspect Ratio GaAs/AlGaAs Nanopillar array Fabricated by Fusion of Bio-Template and Neutral Beam Etching

Y. Tamura^1,6, A. Higo², T. KIba^3,6, W. Yunpeng⁴, C. Thomas^1,6, T. Okada¹, W. Hu^1,6, A. Murayama^3,6, M. Sugiyama⁵, Y. Nakano⁴, S. Samukawa^1,2,6 (1.Tohoku Univ., 2.WPI-AIMR, Tohoku Univ., 3.Hokkaido Univ., 4.RCAST, Univ. of Tokyo, 5.Univ. of Tokyo, 6.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.K-2-5