[K-6-3] Enhanced Electroluminescence from Germanium Waveguides by Local Tensile Strain with Silicon Nitride Stressors

K. Tani^1,2,3, K. Oda^1,2,3, T. Okumura^1,2,3, T. Takezaki³, J. Kasai^1,2,3, T. Mine³, T. Ido^1,2,3 (1.Photonics Electronics Tech. Res. Association, 2.Inst. for Photonics-Electronics Convergence System Tech., 3.Hitachi, Ltd. (Japan))

https://doi.org/10.7567/SSDM.2013.K-6-3