Enhanced Electroluminescence from Germanium Waveguides by Local Tensile Strain with Silicon Nitride Stressors

K. Tani; K. Oda; T. Okumura; T. Takezaki; J. Kasai; T. Mine; T. Ido

doi:https://doi.org/10.7567/SSDM.2013.K-6-3

[K-6-3] Enhanced Electroluminescence from Germanium Waveguides by Local Tensile Strain with Silicon Nitride Stressors

K. Tani^1,2,3、K. Oda^1,2,3、T. Okumura^1,2,3、T. Takezaki³、J. Kasai^1,2,3、T. Mine³、T. Ido^1,2,3 (1.Photonics Electronics Tech. Res. Association、2.Inst. for Photonics-Electronics Convergence System Tech.、3.Hitachi, Ltd. (Japan))

https://doi.org/10.7567/SSDM.2013.K-6-3

2013 International Conference on Solid State Devices and Materials

[K-6-3] Enhanced Electroluminescence from Germanium Waveguides by Local Tensile Strain with Silicon Nitride Stressors