[N-8-4] Diffusion Coefficients of Impurity Atoms in BaSi2 Epitaxial Films Grown by Molecular Beam Epitaxy N. Zhang1、K. Nakamura1、M. Baba1、K. Toko1、T. Suemasu1,2 (1.Univ. of Tsukuba、2.CREST-JST (Japan)) https://doi.org/10.7567/SSDM.2013.N-8-4