[N-8-4] Diffusion Coefficients of Impurity Atoms in BaSi₂ Epitaxial Films Grown by Molecular Beam Epitaxy

N. Zhang¹, K. Nakamura¹, M. Baba¹, K. Toko¹, T. Suemasu^1,2 (1.Univ. of Tsukuba, 2.CREST-JST (Japan))

https://doi.org/10.7567/SSDM.2013.N-8-4