[P-1-5] In-Situ Monitoring of Silicon Nanocrystal Deposition with Pulsed SiH₄ Supply by Optical Emission Spectroscopy of Ar Plasma

K. Ikemoto¹、Y. Nakamine¹、Y. Kawano¹、S. Oda¹ (1.Tokyo Tech. (Japan))

https://doi.org/10.7567/SSDM.2013.P-1-5