[P-2-5] Structural Characterization of Polycrystalline Ge Thin Films on Insulators Formed by Diffusion-enhanced Al-induced Layer Exchange
R. Numata1, K. Toko1, N. Oya1, N. Usami2, T. Suemasu1
(1.Inst. of Appl. Phys., Univ. of Tsukuba, 2.Mater., Phys. and Energy Eng., Nagoya Univ. (Japan))
https://doi.org/10.7567/SSDM.2013.P-2-5
