[P-2-5] Structural Characterization of Polycrystalline Ge Thin Films on Insulators Formed by Diffusion-enhanced Al-induced Layer Exchange

R. Numata¹、K. Toko¹、N. Oya¹、N. Usami²、T. Suemasu¹ (1.Inst. of Appl. Phys., Univ. of Tsukuba、2.Mater., Phys. and Energy Eng., Nagoya Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.P-2-5