The Japan Society of Applied Physics

[P-3-1] Ultrasonic-Assisted Mist Deposition for Green Materials and Devices

S. Fujita1, K. Kaneko2, S. Katori3, T. Kawaharamura4, M. Furuta4 (1.Kyoto Univ., 2.Kyoto Univ., 3.Tsuyama National College of Tech., 4.Kochi Univ. Tech. (Japan))

https://doi.org/10.7567/SSDM.2013.P-3-1