[P-3-4] High-Mobility TiO₂-Channel TFTs with Optimized Anatase Microstructures

T. Yajima¹、G. Oike¹、T. Nishimura¹、K. Nagashio¹、A. Toriumi¹ (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2013.P-3-4