Study on AlGaN/GaN growth on carbonized Si substrate

T. Sakamoto; S. Wakabayashi; T. Takahashi; T. Ide; M. Shimizu; Y. Takanashi

doi:https://doi.org/10.7567/SSDM.2013.P-4-3

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[P-4-3] Study on AlGaN/GaN growth on carbonized Si substrate

T. Sakamoto^1,2, S. Wakabayashi^1,2, T. Takahashi², T. Ide², M. Shimizu², Y. Takanashi¹ (1.Tokyo Univ. of Sci., 2.Advanced Inst. Sci. and Tech. (Japan))

https://doi.org/10.7567/SSDM.2013.P-4-3

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