[P-4-3] Study on AlGaN/GaN growth on carbonized Si substrate

T. Sakamoto^1,2、S. Wakabayashi^1,2、T. Takahashi²、T. Ide²、M. Shimizu²、Y. Takanashi¹ (1.Tokyo Univ. of Sci.、2.Advanced Inst. Sci. and Tech. (Japan))

https://doi.org/10.7567/SSDM.2013.P-4-3