[P-4-4] Performance Improvement of GaN-based MSM Photodiodes Grown on Si(111) Substrate by Thermal Cycle Annealing Process

J.H. Lin¹, S.J. Huang¹, Y.K. Su², C.H. Lai¹ (1.National Cheng Kung Univ, 2.Kun-Shan Univ (Taiwan))

https://doi.org/10.7567/SSDM.2013.P-4-4