[P-4-4] Performance Improvement of GaN-based MSM Photodiodes Grown on Si(111) Substrate by Thermal Cycle Annealing Process

J.H. Lin¹、S.J. Huang¹、Y.K. Su²、C.H. Lai¹ (1.National Cheng Kung Univ、2.Kun-Shan Univ (Taiwan))

https://doi.org/10.7567/SSDM.2013.P-4-4