[PS-1-11] Effect of Oxygen Potential Lowering in N-doped GeO₂ on Suppression of GeO Desorption and Planarization of Ge Interface

T. Tabata^1,2, C.H. Lee^1,2, T. Nishimura^1,2, K. Nagashio^1,2, A. Toriumi^1,2 (1.Univ. of Tokyo, 2.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.PS-1-11