[PS-1-2] Synthesis of Perovskite Structure SrHfO₃ Thin Films on Si Substrates Using RF Sputtering and Rapid Thermal Anneal

S. Migita¹、Y. Morita¹、M. Masahara¹、H. Ota¹ (1.AIST (Japan))

https://doi.org/10.7567/SSDM.2013.PS-1-2