The Japan Society of Applied Physics

[PS-1-3] A New Ar Desorption Peak in Thermal Desorption Spectroscopy Measurement of Sputtered HfO2 Accompanied by its Structural Phase Transformation

T. Iwai1, T. Yajima1, T. Nishimura1, K. Nagashio1, A. Toriumi1 (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2013.PS-1-3